SPV-60 Vacuum plasma cleaning machine
Outline:
Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.
SPV-60 Vacuum plasma cleaning machine
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-60 Vacuum plasma cleaning machine
Industry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: packaging, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-60 Vacuum plasma cleaning machine
Technical specifications
| Power System
| Radio-frequency power supply | Medium-frequency power supply | |
| Power | 0~600W | 0~1000W | |
| Frequency | 13.56MHz | 40KHz | |
| Vacuum system
| Two-stage rotary vane pump (oil pump) | 40m3/h | |
| Vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
| Material | Aluminum alloy (customizable stainless steel chamber) | ||
| Thickness | 25mm | ||
| Leakproofness | Military grade welding seal | ||
| Internal dimension of cavity | 375×375×430mm（W×H×D） | ||
| Effective size of electrode plate | 345×344mm（W×D） | ||
| Available space spacing | 22.5mm | ||
| Electrode plate layout | Horizontal layout, movable extraction | ||
| Work tray | Standard set, material optional (aluminum, wire mesh) | ||
| Work space | 6 layers | ||
| Gas system
| Flow range | 0~300SCCM | |
| Process gas gas circuit | Standard with two channels, can be customized | ||
| Control system | System control | PLC | |
| Delivery method | 7 inch touch screen | ||
| Other Parameter
| Boundary dimension | 900×1600×900mm（寬×高×深） | |
| Weight | 150KG | ||
| Device appearance color | silver gray | ||
Factory specification requirements
| Factory specification requirements | |
| Ac power specifications | Power supply：AC380V，50/60Hz，5 lines，50A |
| Factory exhaust | Flow：2.0 m3/min |
| Gas requirements for factory work | Flow：1~10 L/min Pressure：3~7 kg/cm2 Pipe diameter：6×4 mm Material: PU pipe Purity: above 99.99% |
| Factory compressed air requirements | Flow：1~10 L/min Pressure：3~7 kg/cm2 Pipe diameter：8×5 mm Material: PU pipe Dew point: below -40℃ Particle＞0.3μm：10Pcs/ft3 |
Configuration list
| configuration list | |||||
| No | Name | Description | Unit | Qty | |
| 1 | Host | Boundary dimension：900×1600×900mm（W×H×D） | Pc | 1 | |
| 2 | Vacuum chamber | Aluminum alloy vacuum chamber Inside dimension375×375×430mm（W×H×D） | Pc | 1 | |
| 3 | Excitation power supply | Radio-frequency power supply | Medium-frequency power supply | Set | 1 |
| Frequency：13.56MHz； Power ：0~600W Automatic vacuum capacitor matcher | Frequency：40KHz； 0~1000W;
| ||||
| 4 | PLC | SIEMENS，S7-200 | Pc | 1 | |
| 5 | Touch screen | Vellon, 7 inch screen, MT6071iE | Pc | 1 | |
| 6 | Flowmeter | British Wawick brand | Pc | 2 | |
| 7 | Vacuum pump | Flyover two-stage rotary vane pump (oil pump) : 40m3/h | Pc | 1 | |
| 8 | Vacuum gauge | INFICON
| Pc | 1 | |
| 9 | Manual
| Operation manual of vacuum plasma cleaner SPV-60 | Pc | 1 | |
Optional table
| Optional table | ||
| Excitation power supply | Radio-frequency power supply | Medium-frequency power supply |
| Custom power: frequency：13.56MHz； Power：0~1000W； Custom automatic vacuum capacitor matching machine | Frequency：40KHz，power：2000W
| |
| CERES power supply: frequency 13.56MHz； Power：0~600W or 0~1000W Optional ； American CERES automatic vacuum capacitor matcher | ||
| Vacuum pump | Germany Leibao double-stage rotary vane pump (oil pump)：40m3/h | |
| Flyover two-stage rotary vane pump (oil pump) ：40m3/h | ||
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